Microwave plasma

Microwave plasma

Microwave plasma is a type of plasma, that has high frequency electromagnetic radiation in the GHz range. It is capable of exciting electrodeless gas discharges.

Properties of microwave-excited plasma

If applied in surface-wave-sustained mode, they are especially well suited to generate large-area plasmas of high plasma density. If they are both in surface-wave and resonator mode, they can exhibit a high degree of spatial localisation. This allows to spatially separate the location of plasma generations from the location of surface processing. Such a separation (together with an appropriate gas-flow scheme) may help reduce the negative effect, that particles released from a processed substrate may have on the plasma chemistry of the gas phase.

See also

External links


Wikimedia Foundation. 2010.

Игры ⚽ Нужно решить контрольную?

Look at other dictionaries:

  • microwave plasma etching — mikrobanginis plazminis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. microwave plasma etching vok. Mikrowellenätzung, f rus. микроволновое плазменное травление, n pranc. décapage microhertzien par plasma, m …   Radioelektronikos terminų žodynas

  • Plasma stealth — is a proposed process that uses ionized gas (plasma) to reduce the radar cross section (RCS) of an aircraft. Interactions between electromagnetic radiation and ionized gas have been extensively studied for a variety of purposes, including the… …   Wikipedia

  • Plasma-based weaponry — is any group of weapons designed to use high energy ionized gas or plasma , typically created by superheating lasers or superfrequency devices. There has been notable interest in its development. One plasma prototype weapon exists in Russia which …   Wikipedia

  • Microwave power transmission — (MPT) is the use of microwaves to transmit power through outer space or the atmosphere without the need for wires. It is a sub type of the more general wireless energy transfer methods, and is the most interesting because microwave devices offer… …   Wikipedia

  • Plasma etching — is a form of plasma processing used to fabricate integrated circuits. It involves a high speed stream of glow discharge (plasma) of an appropriate gas mixture being shot (in pulses) at a sample. The plasma source, known as etch species, can be… …   Wikipedia

  • Microwave digestion — is a common technique used by elemental scientists to dissolve heavy metals in the presence of organic molecules prior to analysis by inductively coupled plasma, atomic absorption, or atomic emission measurement. This technique is usually… …   Wikipedia

  • Plasma (physics) — For other uses, see Plasma. Plasma lamp, illustrating some of the more complex phenomena of a plasma, including filamentation. The colors are a result of relaxation of electrons in excited states to lower energy states after they have recombined… …   Wikipedia

  • Plasma cosmology — [ Hannes Alfvén suggested that, by scaling laboratory results by a factor of 109, he could extrapolate magnetospheric conditions. Another scaling jump of 109 was required to extrapolate to galactic conditions, and a third jump of 109 was required …   Wikipedia

  • Microwave oven — A modern microwave oven …   Wikipedia

  • Microwave — This article is about the electromagnetic wave. For the cooking appliance, see Microwave oven. For other uses, see Microwaves (disambiguation). A microwave telecommunications tower on Wrights Hill in Wellington, New Zealand Microwaves, a subset… …   Wikipedia

Share the article and excerpts

Direct link
Do a right-click on the link above
and select “Copy Link”